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Carbon Tetrafluoride

Carbon tetrafluoride (CF4) is a colorless, odorless flammable with relative molecular mass of 88, melting point of 183.6℃, boiling point of 127.8℃. Carbon tetrafluoride has important application in microelectronics industry. Carbon tetrafluoride has been used as a dielectric material for etching silicon dioxide and silicon nitride for many years, it is also the largest dosage of plasma etching gas in the microelectronics industry at present.

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