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Tungsten Hexafluoride

Tungsten hexafluoride is the only one produced steadily and industrially among the fluoride of tungsten, and it is used as the raw material of chemical vapor deposition (CVD) process of tungsten in the electronic industry, which is its main application field. In particular, WSi2 made from WF6 can be used as wiring material in large scale integrated circuit (LSI).

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